Dr. Schenk ParticleInspect for glass wafer particle inspection is designed for high-speed particle detection of bare glass wafers and glass wafers with AR coating.
Dr. Schenk PartcileInspect provides high resolution scanning for smallest particles, such as
This helps ensures that sources of contamination can be identified and addressed before large production loses occur.
ParticleInspect for bare glass wafer inspection can differentiate clearly between A-side and B-side particles, an exclusive benefit of the Dr. Schenk inspection. The system comprises a complete stand alone AOI solution with drawer handling.