Particle Inspection

Dr. Schenk offers a wide variety of particle inspection for different inspection needs and materials.

inline and offline solutions for inspection of bare glass and metallized glass
an offline solution for the inspection of bare and AR-coated glass wafers
an offline solution for the inspection of lithographic photomasks

Bare Glass and Coated Glass

High-speed particle detection for bare glass and coated glass with layer films such as ITO, GIN, Cu, A-Si and Mo. mehr…

Glass Wafers

Particle detection for bare and AR-coated glass wafers mehr…

Particle detection for lithographic photomasks

Particle contamination can disrupt Higher yields through inspection of glass and delay the photolithography process, resulting in yield pellicle side of reticles for particles, defects and productivity losses. To avoid this, masks need to be routinely re-qualified. holes. more

The Dr. Schenk Particle Inspection solutions are used in a wide range of applications and industries, such as flat panel display glass inspection and mobile display glass inspection, semiconductors and many more!